University of Wisconsin-Madison Wisconsin Center for Applied Microelectronics College of Engineering University of Wisconsin-Madison Wisconsin Center for Applied Microelectronics
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Cost Recovery Rates 2013

Internal Rates (UW-Madison users)

Training Access Clean Room Hourly Rate Special Equipment Exceptional Equipment Recharge Cap per User (all fees excluding the Access fee but including Hourly) Custom Processing by Staff
NO CHARGE $200 per new user start + $41/month $38/hour $32/hour $47/hour $670/month $62/hour

Terms: Rates are effective as of July 1st, 2012. A user is a single, unique, individual person; multiple persons cannot be one user.

Academic Institution Rates (Academic users other than UW-Madison)

Training Access Clean Room Hourly Rate Special Equipment Exceptional Equipment Recharge Cap per user — All fees excluding the Access fee but including Hourly) Custom Processing by Staff
NO CHARGE $272 per new user start + $41/month $57/hour with no cap $49/hour $70/hour NO CAP $90/hour

Terms: Rates are effective as of July 1st, 2012. A user is a single, unique, individual person; multiple persons cannot be one user.

External Rates (Non-academic users)

Training Access Clean Room Hourly Rate Special Equipment Exceptional Equipment Recharge Cap per user — All fees excluding the Access fee but including Hourly) Custom Processing by Staff
NO CHARGE $500 per new user start + $52/month $95/hour with no cap $80/hour $118/hour NO CAP $185/hour with no cap

Terms: Rates are effective as of July 1st, 2012. A user is a single, unique, individual person; multiple persons cannot be one user.

Material Charges

Gold: $83/gram

Equipment Categories

Special

PlasmaTherm 70 RIE and PECVD
Unaxis 790 RIE
Trion Phantom RIE
CVC-601 Sputter Deposition
CHA Metal Evaporator
Dielectric Evaporator
Thermal Oxidation

Exceptional

PlasmaTherm 770 ECR (3-5 etcher)
PlasmaTherm 770 ICP (metal etcher)
Trion Minilock
STS ICP
LPCVD Poly
LPCVD Nitride
LTO

No additional charge

These systems are made available under the lab entrance fee, and incur no additional equipment charge:




Copyright 2011 The Board of Regents of the University of Wisconsin System
Date last modified: 05-Jan-2011
Date created: 21-Jun-2007
Content provided by Jon McCarthy: jjmccarthy@wisc.edu
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